Superhard nanocomposite nc-TiC/a-C:H coatings: The effect of HiPIMS on coating microstructure and mechanical properties

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Publikace nespadá pod Filozofickou fakultu, ale pod Přírodovědeckou fakultu. Oficiální stránka publikace je na webu muni.cz.
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SOUČEK Pavel DANIEL Josef HNILICA Jaroslav BERNÁTOVÁ Katarína ZÁBRANSKÝ Lukáš BURŠÍKOVÁ Vilma STUPAVSKÁ Monika VAŠINA Petr

Rok publikování 2017
Druh Článek v odborném periodiku
Časopis / Zdroj Surface & coatings technology
Fakulta / Pracoviště MU

Přírodovědecká fakulta

Citace
www http://www.sciencedirect.com/science/article/pii/S025789721730021X
Doi http://dx.doi.org/10.1016/j.surfcoat.2017.01.021
Obor Fyzika plazmatu a výboje v plynech
Klíčová slova http://dx.doi.org/10.1016/j.surfcoat.2017.01.021
Popis Nanocomposite coatings consisting of titanium carbide crystallites embedded in amorphous carbon matrix were deposited utilizing direct current magnetron sputtering (DCMS) and high power impulse magnetron sputtering (HiPIMS) of titanium target in argon/acetylene atmosphere. DC driven depositions of coatings with high amount of carbon were accompanied by significant arcing during the deposition. HiPIMS utilization made reliable arc-free deposition of coatings with high carbon content possible. Analyses of the coating structure revealed that utilization of HiPIMS favours carbon incorporation into the TiCx grains rather than to the matrix. HiPIMS deposited coatings exhibited stoichiometry of the TiCx grains closer to unity with grains exhibiting lower lattice parameter and a lower fraction of the a-C matrix. This led to a smaller mean TiCx grain separation by the a-C:H matrix. Also the surface structure of the HiPIMS deposited coatings was much finer. The structure refinement resulted in overall higher hardness of HiPIMS deposited coatings with the hardest coatings reaching the superhard region of > 40 GPa and in 40% increase of H/E ratio and nearly threefold increase of H3/E2 ratio.
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