Feasibility study of WBC synthesis from segmented magnetron target
| Autoři | |
|---|---|
| Rok publikování | 2017 |
| Druh | Konferenční abstrakty |
| Fakulta / Pracoviště MU | |
| Citace | |
| Popis | Advanced segmented target was used for precise controlling of the chemical composition of the deposited coating. The target was composed of W, C, B4C cylindrical segments. Both homogeneous and highly-inhomogeneous coatings were deposited on steel substrate to determine the influence of the chemical composition on the properties of the deposited coatings. W-B-C coatings were synthesized using DC and pulsed DC magnetron sputtering. Substrates and coatings were heated during deposition to the temperature of 450 °C. Different values of negative bias were applied to substrate during deposition (50 V – 400 V). |
| Související projekty: |
|