Optical characterization of ZnSe thin films

• Autoři: FRANTA Daniel; OHLÍDAL Ivan; KLAPETEK Petr; MONTAIGNE-RAMIL Alberto; BONANNI Alberta; STIFTER David; SITTER Helmut
• Rok publikování: 2003
• Druh: Článek ve sborníku
• Konference: 19th Congress of the International Commission for Optics: Optics for the Quality of Life
• Fakulta / Pracoviště MU: Přírodovědecká fakulta
• www: http://hydra.physics.muni.cz/~franta/bib/SPIE4829_831.html
• Obor: Fyzika pevných látek a magnetismus
• Klíčová slova: ZnSe; Optical constants; Ellipsometry
• Popis: In this paper the optical method based on multisample modification variable angle spectroscopic ellipsometry (VASE) is used to characterize thin films of ZnSe prepared by molecular beam epitaxy onto GaAs single crystal substrates. It is found that this method can be employed for determining the spectral dependences of the optical constants and values of the thicknesses of the films mentioned. Moreover, it is shown that using this method the RMS values of the heights and the values of the correlation length characterizing roughness irregularities of the upper boundaries of the films can be determined as well. The application of the method is illustrated by means of characterizing six samples of the ZnSe-films exhibiting different values of the thicknesses.

Související projekty

• Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek