Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry
| Autoři | |
|---|---|
| Rok publikování | 2003 |
| Druh | Článek v odborném periodiku |
| Časopis / Zdroj | Proceedings of SPIE |
| Fakulta / Pracoviště MU | |
| Citace | |
| Obor | Optika, masery a lasery |
| Klíčová slova | fims nonuniform in optical parameters; optical characterization |
| Popis | In this paper, a new optical method for characterizing nonuniform thin films is employed. For applying this method the special experimental arrangement containing CCD camera as a detector is used. Using this experimental arrangement the spectral dependences of the local reflectances are obtained. After treating these experimental data the distributions of the values of the local thicknesses and local refractive index along a large areas of the substrates of the nonuniform films are found. Moreover, it is shown that this method can be used to determine strong nonuniformities in both the optical parameters. |
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