Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model

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Publikace nespadá pod Filozofickou fakultu, ale pod Přírodovědeckou fakultu. Oficiální stránka publikace je na webu muni.cz.
Název česky Stanovení koncentrace a teploty elektronů v kapacitně vázaném RF výboje v neonu z OES doplněné CR modelem
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NAVRÁTIL Zdeněk DVOŘÁK Pavel BRZOBOHATÝ Oto TRUNEC David

Rok publikování 2010
Druh Článek v odborném periodiku
Časopis / Zdroj Journal of Physics D: Applied Physics
Fakulta / Pracoviště MU

Přírodovědecká fakulta

Citace
www http://dx.doi.org/10.1088/0022-3727/43/50/505203
Obor Fyzika plazmatu a výboje v plynech
Klíčová slova High-frequency and RF discharges; Particle-in-cell method; Transport properties; Monte Carlo methods; Optical measurements
Popis A method of determination of electron temperature and electron density in plasmas based on optical emission spectroscopy complemented with collisional-radiative modelling (OES/CRM) was studied in this work. A radiofrequency (13.56 MHz) capacitively coupled discharge in neon at 10 Pa was investigated by intensity calibrated optical emission spectroscopy. The absolute intensities of neon transitions between 3p and 3s states were fitted with a collisional-radiative (CR) model in order to determine the electron temperature and electron density. Measuring techniques such as imaging with an ICCD camera were adopted for supplementary diagnostics. The obtained results were compared with the results of compensated Langmuir probe measurement and one-dimensional particle-in-cell/Monte Carlo (PIC/MC) simulation. The results of OES/CRM and PIC/MC method were in close agreement in the case of electron temperature in the vicinity of a driven electrode. The determined value of electron temperature was about 8 eV. In bulk plasma, the measured spectra were not satisfactorily fitted. In the case of electron density only relative agreement was obtained between OES/CRM and Langmuir probe measurement; the absolute values differed by a factor of 5. The axial dependence of electron density calculated by PIC/MC was distinct from them, reaching the maximum values between the results of the other two methods. The investigation of power dependence of plasma parameters close to the driven electrode showed a decrease in electron temperature and an increase in electron density together with increasing incoming RF power. The calculated spectra fitted very well the measured spectra in this discharge region.
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