Reduction of tungsten precursors in inductively coupled RF discharge
Autoři | |
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Rok publikování | 2003 |
Druh | Článek ve sborníku |
Konference | Progress in Plasma Processing of Materials 2003 |
Fakulta / Pracoviště MU | |
Citace | |
Obor | Fyzika plazmatu a výboje v plynech |
Klíčová slova | plasma reduction; tungsten carbide;inductively coupled RF plasma; tungsten precursors |
Popis | Synthesis of catalytically active tungsten carbide compounds with the aid of plasmachemical reaction.Ammonium paratungstate (APT) was used as precursor.The final powder was mixture of tungsten and tungsten carbide (6%), grain size 50 um. |
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