Reduction of tungsten precursors in inductively coupled RF discharge

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Authors

JANČA Jan ELIÁŠ Marek BROŽEK Vlastimil

Year of publication 2003
Type Article in Proceedings
Conference Progress in Plasma Processing of Materials 2003
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords plasma reduction; tungsten carbide;inductively coupled RF plasma; tungsten precursors
Description Synthesis of catalytically active tungsten carbide compounds with the aid of plasmachemical reaction.Ammonium paratungstate (APT) was used as precursor.The final powder was mixture of tungsten and tungsten carbide (6%), grain size 50 um.
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