Project information
Research and development and industrializartion of novel super hard nanocrystalline materials
- Project Identification
- ME 367
- Project Period
- 7/2000 - 6/2002
- Investor / Pogramme / Project type
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Ministry of Education, Youth and Sports of the CR
- Programme KONTAKT (ME+MEB)
- MU Faculty or unit
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Faculty of Science
- prof. RNDr. Jan Janča, DrSc.
Development and industrialization of new superhard nanocristalline TiN/AlN/SiN coatings in collaboration with the Institut for Inorganic Materials, Munich, Germany and SHM company will be realized. Department of Physical Electronics will specialize in monitoring of plasma processes running during the deposition of superhard coatings using preferable optical spectroscopy and probe methods. On the base of spectral and probe measurements we develop simple detectors making possible to monitor plasmachemical processes in order to obtain superhard coatings with optimal mechanical properties. Moreover, the microwave experimetal set-up (the ASTEX type) for the depositon od diamond-like coatings, BN type will be arranged at MU. We also develop other deposition device generating plasma with homogenuos radial profile. A new high frequency generator with inductively coupled plasma for the deposition of nanocomposite materials like CN/SiO and CN/SiN will be developed, too.
Publications
Total number of publications: 24
2003
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Deposition of Hard carbon films and Its Diagnostics
Proceedings of the XIVth SAPP, year: 2003
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Hard carbon films: Deposition and diagnostics
Acta Physica Slovaca, year: 2003, volume: vol. 53, edition: No. 5
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Increase od Dissociation Degree in Afterglow Due to Admixtures
Proceedings of the XIVth SAPP, year: 2003
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Optical Diagnostics of ICP Dischare During Synthesis of Tungsten Carbide
Proceedings of the XIV Symposium on Application of Plasma Processes, year: 2003
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Study of high power pulsed microwave discharge
Microwave discharges: fundamentals and applications, year: 2003
2002
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Advanced methods for deposition of thin films: monitoring, properties, application
Year: 2002, number of pages: 157 s.
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Plasmachemical synthesis of tungsten carbide
Proc.12 Joint Seminar" Development of Material Science in Research and Education, year: 2002
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Plasmachemical synthesis of tungsten carbide for catalysis
CHISA 2002, year: 2002
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Simultaneous plasmachemical reduction of mixed tungsten and titanion precursors
Czech. Jourmal of Physics, year: 2002, volume: 2002, edition: 52
2001
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Deposition of DLC:Si(O) Films in Low Pressure Discharges
Proceedings of 13th Symposium on Application of Plasma Processes, year: 2001