Properties of nc-TiC/a-C:H films prepared by PVD-PECVD process at low and high ion bombardment
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| Year of publication | 2012 |
| Type | Conference abstract |
| MU Faculty or unit | |
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| Description | Two sets of nc-TiC/a-C:H coatings with varying chemical composition were prepared using a hybrid PVD-PECVD deposition process combining sputtering of titanium target in argon/acetylene. The range of chemical compositions was chosen appropriately to optimize the hardness of the coatings – from 30at. % to 70 at. % Ti. The main goal of this contribution is focused on comparison of structure, chemical composition, and mechanical properties of the coatings prepared at different ion bombardment conditions. Time evolution of the deposition process is also taken into account. |
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