Hybrid PVD-PECVD Process and Its Application for Carbon Ritch Nanocomposite Thin Film Deposition

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Authors

VAŠINA Petr SCHMIDTOVÁ Tereza SOUČEK Pavel BURŠÍKOVÁ Vilma

Year of publication 2012
Type Article in Proceedings
Conference Vrstvy a povlaky 2010: Zborník prednášok
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords hybrid PVD-PECVD; magnetron sputtering
Description This paper dsiscusses the tybrid PVD-PECVD process and its application for carbon ritch nanocomposite thin film deposition
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