Hybrid PVD-PECVD Process and Its Applications for Carbon Rich Nanocomposite Thin Film Deposition

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Authors	VAŠINA Petr SCHMIDTOVÁ Tereza SOUČEK Pavel BURŠÍKOVÁ Vilma
Year of publication	2013
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	This contibution deals with study of hybrid PVD-PECVD process and its applications for carbon rich nanocomposite thin film deposition
Related projects:	CEPLANT - Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev