Study of the nanoindentation induced defects in nanocomposite n-TiC/a-C:H films

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Authors

BURŠÍKOVÁ Vilma BURŠÍK Jiří ZÁBRANSKÝ Lukáš VAŠINA Petr SOUČEK Pavel PEŘINA Vratislav

Year of publication 2014
Type Article in Proceedings
Conference Local Mechanical Properties X , Key Engineering Materials
MU Faculty or unit

Faculty of Science

Citation
Web http://www.scientific.net
Doi http://dx.doi.org/10.4028/www.scientific.net/KEM.606.159
Field Plasma physics
Keywords nanocomposite; PVD; mechanical properties; indentation induced defects; TEM; FIB
Description The aim of the present work is to study the thermal resistance of nanocomposite n-TiC/a-C:H coatings. Furthermore, the resistance of the coatings against indentation induced defect creation was studied using TEM analysis of lamellas prepared on a dual-beam microscope using a focused ion beam for both as-deposited and annealed samples (500-700oC).
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