Study of the nanoindentation induced defects in nanocomposite n-TiC/a-C:H films

• Authors: BURŠÍKOVÁ Vilma; BURŠÍK Jiří; ZÁBRANSKÝ Lukáš; VAŠINA Petr; SOUČEK Pavel; PEŘINA Vratislav
• Year of publication: 2014
• Type: Article in Proceedings
• Conference: Local Mechanical Properties X , Key Engineering Materials
• MU Faculty or unit: Faculty of Science
• Web: http://www.scientific.net
• Doi: http://dx.doi.org/10.4028/www.scientific.net/KEM.606.159
• Field: Plasma physics
• Keywords: nanocomposite; PVD; mechanical properties; indentation induced defects; TEM; FIB
• Description: The aim of the present work is to study the thermal resistance of nanocomposite n-TiC/a-C:H coatings. Furthermore, the resistance of the coatings against indentation induced defect creation was studied using TEM analysis of lamellas prepared on a dual-beam microscope using a focused ion beam for both as-deposited and annealed samples (500-700oC).

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