PLASMA-SURFACE INTERACTION EFFECTS DURING ATMOSPHERIC PRESSURE PLASMA MODIFICATION OF SILICON

Investor logo

Warning

This publication doesn't include Faculty of Arts. It includes Faculty of Science. Official publication website can be found on muni.cz.
Authors

SKÁCELOVÁ Dana ČECH Jan ČERNÁK Mirko

Year of publication 2014
Type Article in Proceedings
Conference HAKONE XIV, 2014 Zinnowitz Germany, Book of Contributions
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords interaction; plasma; surface; barrier discharge;coplanar; DCSBD; Silicon
Description The aim of this work is to study the characterization of plasma-surface interaction of silicon in DCSBD plasma. The influence of the plasma, generated in ambient air on the silicon surface properties with respect to the filamentary nature of DCSBD was studied. Surface properties and chemical composition of silicon were studied by SEM and EDX, respectively. The experimental data were successfully supported by the modeling.
Related projects:

You are running an old browser version. We recommend updating your browser to its latest version.