PLASMA-SURFACE INTERACTION EFFECTS DURING ATMOSPHERIC PRESSURE PLASMA MODIFICATION OF SILICON
| Authors | |
|---|---|
| Year of publication | 2014 |
| Type | Article in Proceedings |
| Conference | HAKONE XIV, 2014 Zinnowitz Germany, Book of Contributions |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | interaction; plasma; surface; barrier discharge;coplanar; DCSBD; Silicon |
| Description | The aim of this work is to study the characterization of plasma-surface interaction of silicon in DCSBD plasma. The influence of the plasma, generated in ambient air on the silicon surface properties with respect to the filamentary nature of DCSBD was studied. Surface properties and chemical composition of silicon were studied by SEM and EDX, respectively. The experimental data were successfully supported by the modeling. |
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