STUDY OF MECHANICAL PROPERTIES OF NANOSTRUCTURED POLYMER COATINGS PREPARED USING PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION

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Authors	BURŠÍKOVÁ Vilma HOMOLA Vojtěch PEŘINA Vratislav
Year of publication	2015
Type	Article in Proceedings
Conference	NANOCON 2015: 7TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	PECVD; hexamethyldisiloxane; mechanical properties; nanoDMA
Description	The aim of the present work was to deposit transparent polymer SiOxCyHz protective coatings from hexamethyldisiloxane/oxygen mixtures in capacitively coupled glow discharge. The coatings prepared under dusty plasma conditions showed nanocomposite character. The coatings were very elastic, they exhibited high elastic recovery and low plastic.
Related projects:	CEITEC - Central European Institute of Technology Lokální mikrostrukturní změny vyvolané statickou a dynamickou indentací nanostrukturovaných a nanolaminovaných povlaků Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy