Diffuse Coplanar Surface Barrier Discharge: Influence of Gas Humidity on Plasma Parameters

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Authors

ČECH Jan SŤAHEL Pavel DVOŘÁKOVÁ Hana ČERNÁK Mirko

Year of publication 2015
Type Article in Periodical
Magazine / Source Plasma Physics and Technology
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords DCSBD; barrier discharge; atmospheric pressure; humidity; pattern; OES
Description It was found that the working gas humidity influences substantially the parameters of diffuse coplanar surface barrier discharge. The absolute humidity of air or N2 has a strong influence on the discharge pattern and its macroscopic homogeneity. The amount of H2O in working gas influences also generated radicals and the plasma chemistry. We suggest that the humidity of working gas should be a controlled parameter of in-line atmospheric pressure plasma treatment under real industrial conditions.
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