Ellipsometric characterization of highly non-uniform thin films with the shape of thickness non-uniformity modeled by polynomials

Investor logo

Warning

This publication doesn't include Faculty of Arts. It includes Faculty of Science. Official publication website can be found on muni.cz.
Authors

VOHÁNKA Jiří FRANTA Daniel ČERMÁK Martin HOMOLA Vojtěch BURŠÍKOVÁ Vilma OHLÍDAL Ivan

Year of publication 2020
Type Article in Periodical
Magazine / Source Optics Express
MU Faculty or unit

Faculty of Science

Citation
Web Přeměruje na stránku u nakladatele
Doi http://dx.doi.org/10.1364/OE.380657
Keywords optical characterization;thickness non-uniform films;ellipsometry
Description A common approach to non-uniformity is to assume that the local thicknesses inside the light spot are distributed according to a certain distribution, such as the uniform distribution or the Wigner semicircle distribution. A model considered in this work uses a different approach in which the local thicknesses are given by a polynomial in the coordinates x and y along the surface of the film. An approach using the Gaussian quadrature is very efficient for including the influence of the non-uniformity on the measured ellipsometric quantities. However, the nodes and weights for the Gaussian quadrature must be calculated numerically if the non-uniformity is parameterized by the second or higher degree polynomial. A method for calculating these nodes and weights which is both efficient and numerically stable is presented. The presented method with a model using a second-degree polynomial is demonstrated on the sample of highly non-uniform polymer-like thin film characterized using variable-angle spectroscopic ellipsometry. The results are compared with those obtained using a model assuming the Wigner semicircle distribution.
Related projects:

You are running an old browser version. We recommend updating your browser to its latest version.