Diagnostics of reactive magnetron sputtering

Warning

This publication doesn't include Faculty of Arts. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	VAŠINA Petr DVOŘÁK Pavel SCHMIDTOVÁ Tereza BURŠÍKOVÁ Vilma ŽEMLIČKA Radek
Year of publication	2010
MU Faculty or unit	Faculty of Science
Citation
Description	Monitoring of reactive magnetron sputtering and thin film deposition/etching by means of higher harmonic frequencies.
Related projects:	Early diagnostics and treatment of cardiovascular diseases Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges Study of hybrid deposition process and its application for thin film deposition