OVĚŘENÁ TECHNOLOGIE - Průmyslová příprava TiZrN vrstev

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Title in English	Proven technology - Industrial deposition of TiZrN coatings
Authors	SOCHORA Vjačeslav VAŠINA Petr
Year of publication	2021
MU Faculty or unit	Faculty of Science
Description	The deposition technology of Ti_Zr_N coatings with enhanced fracture toughness is based on reactive magnetron sputtering of a rotating cylindrical target composed of titanium (Ti) and zirconium (Zr) segments.
Related projects:	Vývoj průmyslové technologie pro depozice tvrdých XBC a TiXN povlaků se zvýšenou lomovou houževnatostí