Dynamics of the titanium ground state atoms and ions in HiPIMS discharge

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Authors

HNILICA Jaroslav KLEIN Peter VAŠINA Petr SNYDERS Rony BRITUN Nikolay

Year of publication 2021
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description This contribution reports on plasma diagnostics of HiPIMS discharge by laser-induced fluorescence and atomic absorption spectroscopy. As a result of discharge characterization, the number densities, as well as temporal propagation of the neutral and ionized sputtered titanium atoms were determined. The results obtained in this study can be utilized to control the ionization degree, sputtering rate, as well as the other discharge parameters in industrial deposition processes involving HiPIMS discharges.
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