Temperature measurements of various objects immersed in rf low pressure plasma supported by plasma optical diagnostics

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Authors	ZAJÍČKOVÁ Lenka BURŠÍKOVÁ Vilma BRABLEC Antonín KLÍMA Miloš
Year of publication	1997
Type	Article in Proceedings
Conference	18th Symp. on Plasma Physics and Technology
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Related projects:	Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates