Structural characterization of lamellar multilayer gratings by X-ray reflectivity and scanning electron microscopy

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Authors	JERGEL M. MIKULÍK Petr MAJKOVÁ E. LUBY Š. SENDERÁK R. PINČÍK E. BRUNEL M. KOSTIČ I. KONEČNÍKOVÁ A.
Year of publication	1999
Type	Article in Periodical
Magazine / Source	J. Phys. D: Appl. Phys.
MU Faculty or unit	Faculty of Science
Citation
Web	http://www.sci.muni.cz/~mikulik/Publications.html#JergelMikulikXTOP98
Field	Solid matter physics and magnetism
Keywords	gratings; multilayers; x-ray reflectivity
Description	Structural characterization of a fully etched amorphous W/Si multilayer grating with lateral periodicity 800 nm is performed by x-ray reflectivity. Grating truncation rod profiles have been calculated using a matrix modal eigenvalue approach of the dynamical theory of reflectivity by gratings which generalizes the Fresnel transmission and reflection coefficients for lateral diffraction. The interface roughness in rough gratings has been taken into account by a coherent amplitude approach which damps the generalized Fresnel coefficients. Scanning electron microscopy pictures complete the study.
Related projects:	Physical properties of new materials and layered structures