X-ray reflection by rough multilayer gratings: Dynamical and kinematical scattering
| Authors | |
|---|---|
| Year of publication | 1999 |
| Type | Article in Periodical |
| Magazine / Source | Phys. Rev. B |
| MU Faculty or unit | |
| Citation | |
| Web | http://www.sci.muni.cz/~mikulik/Publications.html#RMLGsPhysRevB1 |
| Field | Solid matter physics and magnetism |
| Keywords | x-ray reflectivity; multilayers; roughness; gratings |
| Description | X-ray reflectivity by rough multilayer gratings is treated in the framework of the kinematical and dynamical theories. The kinematical scattering integral is calculated without the restrictions of the Fraunhofer approximation. The dynamical theory is presented by the matrix modal eigenvalue approach. In both theories we generalize the Fresnel reflection and transmission coefficients for the case of grating diffraction. We obtained one unique formalism which permits us to compare directly the results of both theories. Furthermore, interface and side wall roughnesses are taken into account. The dynamical approach allowed to explain the experimental results obtained from a partially etched GaAs/InP periodic multilayer grating. |
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