Ellipsometric parameters and reflectances of thin films with slightly rough boundaries

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Authors	FRANTA Daniel OHLÍDAL Ivan
Year of publication	1998
Type	Article in Periodical
Magazine / Source	Journal of modern optics
MU Faculty or unit	Faculty of Science
Citation
Web	http://hydra.physics.muni.cz/~franta/bib/JMO45_903.html
Field	Optics, masers and lasers
Description	In this theoretical paper formulae for important optical quantities of single layers with slightly randomly rough boundaries are derived by means of a generalized Rayleigh-Rice theory. Thus the formulae for the specular reflectances, ellipsometric parameters and flux of scattered energy of the layers mentioned are presented. The theoretical results are illustrated by a numerical analysis. Practical features implied by this analysis to be relevant from the experimental point of view are introduced as well.
Related projects:	Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods