Kinetics of N2+HMDSZ gas phase chemical reactions in a remote RF plasma reactor with electron spin resonance

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Authors	JANČA Marek JANČA Jan KUDRLE Vít TÁLSKÝ Antonín
Year of publication	1999
Type	Article in Proceedings
Conference	Proceedings of 14th International Symposium on Plasma Chemistry
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Attached files	ispc99.zip
Related projects:	Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates