Reduction of ATP precursors in capacvitive RF discharge plasma reactor

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Title in English	Reduction of ATP precursors in capacitive RF discharge plasma reactor
Authors	BROŽEK V. ŠARMAN L. DUFEK V. JANČA Jan LAPČÍK L.
Year of publication	2000
Type	Article in Proceedings
Conference	14th International Congress, CHISA 2000, Prague, August 2000
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	reduction; tungsten trioxide; ammoniumparatungstate; capacitive coupled; plasma
Description	The production of tungsten powder is based on precursors which in the first phase of thermic decomposition pass to tungsten trioxide. The subsequent reduction by hydrogen affects the morphology as well as granulometry of the tungsten produced. The contribution deals with the utilisation of plasmachemical decomposition and the activation of ammoniumparatungstate (APT) products in capacitively excited hydrogen plasma.
Related projects:	Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates