Stanovení povrchové energie tenkých vrstev nanášených v plazmatu vysokofrekvenčního výboje
| Title in English | Determination of Surface Energy of Plasma Deposited Thin Films |
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| Authors | |
| Year of publication | 2001 |
| Type | Article in Proceedings |
| Conference | JUNIORMAT 01 |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | Contact angle measurement; surface energy; microhardness; PECVD; Diamond-like carbon |
| Description | The aim of the present work is to characterise plasma deposited silicon containing diamond-ĺike films (DLC) by two experimental methods: by means of the commercial device equipped with CCD camera and by the method using a laser beam for the contact angle measurement. We found out, that addition of hexamethyldisiloxane into the gas mixture for DLC film deposition gives the possibility to modify the the wetting, sticking and mechanical properties of DLC films. |
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