Improvement of the Efficiency of the Silicon P-I-N cells by Silicon Incorporated Diamond-like Carbon Antireflective Coating

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Authors

SLÁDEK Petr BURŠÍKOVÁ Vilma SŤAHEL Pavel

Year of publication 2001
Type Article in Proceedings
Conference 19th International Conference on Amorphous and Microcrystalline Semiconductors
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords Diamod-like carbon; antireflective coatings; solar cells
Description In the present work, the optoelectronical and mechanical properties of the silicon solar cells coated by PECVD with DLC:Si coatings, prepared under different deposition conditions are investigated.
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