Diagnostics of Radio Frequency Oxygen Plasma by Optical Emission Spectroscopy

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Authors	SUBEDI Deepak Prasad ZAJÍČKOVÁ Lenka BURŠÍKOVÁ Vilma JANČA Jan
Year of publication	2001
Type	Article in Proceedings
Conference	WDS'01 Proceedings of Contributed Papers
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	rf plasma; emission sectroscopy; rotational temperature; actinometry
Description	Low pressure radio-frequency plasma produced in a capacitively coupled planar reactor has been studied by optical emission spectroscopy. Rotational temperature of oxygen molecule has been estimated at pressure 37 Pa and rf power 100-450 W. Concentration of atomic oxygen atom was monitored by actinometry.
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