GID study of strains in Si due to patterned SiO2

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Authors

DANIEL A. HOLÝ Václav BAUER G.

Year of publication 2001
Type Article in Periodical
Magazine / Source J. Phys.D.: Appl. Phys.
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Description GID study of strains in Si due to patterned SiO2
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