Improvement of the efficiency of the silicon solar cells by silicon incorporated diamond-like carbon antireflective coatings

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Authors	BURŠÍKOVÁ Vilma SLÁDEK Petr SŤAHEL Pavel ZAJÍČKOVÁ Lenka
Year of publication	2002
Type	Article in Periodical
Magazine / Source	Journal of Non-Crystalline Solids
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	silicon solar cells; antireflective coatings; diamond-like films; PECVD
Description	Silicon incorporated diamond-like antireflective coatings were deposited upon the silicon solar cells in order to improve their efficiency. The films were prepared by plasma enhanced chemical vapor deposition (PECVD) technique from the mixture of hexamethyldisiloxane (HMDSO) and methane. The optical and tribological properties of the coatings could be easily changed by the percentage of the HMDSO in the deposition feed.
Related projects:	Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate Plasma deposition of protective coatings: characterisation of prepared films and diagnostics of reactive plasmas used Optical and mechanical properties of DLC : Si thin films prepared by the PECVD method Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates