Optical diagnostics of atmospheric pressure glow discharge in nitrogen with admixture of organosilicon

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Authors

NAVRÁTIL Zdeněk SŤAHEL Pavel TRUNEC David BURŠÍKOVÁ Vilma BRABLEC Antonín

Year of publication 2003
Type Article in Proceedings
Conference Proceedings of ICPIG XXVI
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords atmospheric pressure glow dicharge; spectroscopy; nitrogen; organosilicon
Description The atmospheric pressure glow discharge in nitrogen with small admixture of different organosilicon compounds such as hexamethyldisilazane and hexamethyldisiloxane was studied by means of emission spectroscopy. The deposited films were studied by means of indentation techniques.
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