Plasma Deposition of Diamond-Like Protective Coating with Silicon Oxide Content

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Authors

DVOŘÁK Pavel ZAJÍČKOVÁ Lenka BURŠÍKOVÁ Vilma VALTR Miroslav HOUDKOVÁ J. PEŘINA V. MACKOVÁ A.

Year of publication 2003
Type Article in Proceedings
Conference 46th Annual SVC Technical Conference Proceedings
MU Faculty or unit

Faculty of Informatics

Citation
Field Plasma physics
Keywords Wear/abrasion-resistant coatings; Plasma enhanced CVD; Stability properties; Residual film stress
Description Amorphous diamond-like carbon films with various silicon and oxygen content were deposited by plasma-enhanced chemical vapor deposition technique. The films were prepared from the mixture of methane and hexamethyldisiloxane in rf capacitively coupled discharges. The optimum SiOx percentage in the DLC network at which the thermo-mechanical stability of the DLC films was improved was determined.
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