Utilization of atmospheric pressure glow discharge for the deposition of thin polymer films
Authors | |
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Year of publication | 2003 |
Type | Article in Proceedings |
Conference | WDS'03 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media |
MU Faculty or unit | |
Citation | |
Field | Plasma physics |
Keywords | atmospheric pressure glow dicharge; spectroscopy; nitrogen; organosilicon |
Description | Utilization of atmospheric pressure glow discharge for the deposition of thin polymer films |
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