Effect of the Discharge Conditions on the Mechanical Properties of the Plasma Deposited DLC:SiOx Films

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Authors

BURŠÍKOVÁ Vilma DVOŘÁK Pavel ZAJÍČKOVÁ Lenka KLAPETEK Petr BURŠÍK Jiří JANČA Jan

Year of publication 2003
Type Article in Proceedings
Conference Proceedings of SAPP XIV
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords discharge conditions; mechanical properties; plasma deposited films
Description Hard diamond like carbon films with insorporation of SiOx were deposited from mixture of methane and HMDSO. The Hardness, elastic modulus, interfacial fracture toughness and their dependence on the HMSDO to methane ratio were studied. The correlation between the discharge parameters and the film properties was determined.
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