Plasma potential in low-pressure capacitive r.f. discharges

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Authors

DVOŘÁK Pavel ZAJÍČKOVÁ Lenka JANČA Jan

Year of publication 2003
Type Article in Proceedings
Conference WDS'03 Proceedings of contributed papers, part 2
MU Faculty or unit

Faculty of Informatics

Citation
Field Plasma physics
Keywords plasma potential; hydrogen; Langmuir probe
Description We observed two different discharge modes in hydrogen. The modes differed significantly in a visual appearance, plasma potential and in the shape of electron energy distribution function. In order to explain it we established a simple model anabling an aproximate calculation of the plasma potential. This model is not capable to predict real values of the plasma potential but it can qualitatively explain the observed effect.
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