Reduction of tungsten precursors in inductive rf discharge plasma reactors

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Authors	JANČA Jan ELIÁŠ Marek BROŽEK Vlastimil
Year of publication	2003
Type	Article in Periodical
Magazine / Source	High Temperature Material Processes
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	tungsten; tungsten carbide; plasma reduction; plasma carbidization;inductive coupled .h.f. plasma reactor
Description	Ammonium paratungstate (APT) was reduced in inductively coupled h.f. plasma reactor(4 MHz,2 kW). As working gas was used hydrogen. If the mixture of hydrogen with hydrocarbon is used (methane, propan butane)it is possible to prepare also tungsten carbide in the ratio up to WC/W=80/20.
Related projects:	Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates