X-ray grazing incidence study of inhomogeneous strain relaxation in Si/SiGe wires

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Authors	HOLÝ Václav
Year of publication	2003
Type	Article in Periodical
Magazine / Source	Nuclear Instruments & Methods in Physics Research A
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	X-ray grazing incidence study of inhomogeneous strain relaxation in Si/SiGe wires
Description	X-ray grazing incidence study of inhomogeneous strain relaxation in Si/SiGe wires
Related projects:	Physical properties of new materials and layered structures