Aberration integrals for the low-voltage foil corrector
Authors | |
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Year of publication | 2004 |
Type | Article in Periodical |
Magazine / Source | Nuclear Instruments & Methods in Physics Research A |
MU Faculty or unit | |
Citation | AKEN, Rogier van, Michal LENC and James BARTH. Aberration integrals for the low-voltage foil corrector. Nuclear Instruments & Methods in Physics Research A. Elsevier B.V., 2004, A 519, 1-2, p. 205-215. ISSN 0168-9002. |
Field | Theoretical physics |
Keywords | Spherical aberration; Aberration integrals; Electron microscopy |
Description | The theory for the calculation of the aberrations of the low-voltage foil corrector is developed. |
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