Fast dynamics of ionized species in high power pulsed magnetron discharge

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Authors

VAŠINA Petr MEŠKO Marcel TOUZEAU Michel BRETAGNE Jean GANCIU Mihai

Year of publication 2004
Type Article in Proceedings
Conference Bulletin of the American Physical Society, Series II, Vol. 49, No. 5
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords preionization; pulsed magnetron discharge; copper
Description A high power density 1kW/cm2 preionized pulsed magnetron plasma was investigated. Applied voltage of 1 kV caused fast magnetron current increase, and, after few microseconds, dense plasma was formed characterized by a pressure independent value of 40 A for a 3 cm copper cathode. For times higher than 5 microsecond, plasma composition was dominated by metal ions and selfsputtering process took place.
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