Energy Spectra of Ions in the Hydrogen Capacitively Coupled Low-Pressure Discharge
| Authors | |
|---|---|
| Year of publication | 2005 |
| Type | Article in Proceedings |
| Conference | SAPP XV - Book of contributed papers |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | IEDF hydrogen capacitive plasma low-pressure |
| Description | The IEDFs of ions flowing from hydrogen asymmetric capacitively coupled low-pressure discharge were measured. The dependencies of their shapes and integrals on the measurement position are presented. |
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