Mechanické vlastnosti plazmově deponovaných tenkých vrstev na různých substrátech

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Title in English Mechanical properties of PCVD thin solid films on various substrates
Authors

BURŠÍKOVÁ Vilma SOBOTA Jan BURŠÍK Jiří NAVRÁTIL Vladislav

Year of publication 2005
Type Article in Proceedings
Conference 1. Slovensko - Český seminár "Lokálne mechanické vlastnosti"
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords Thin solid films; microhardness; low temperature plasma
Description Mechanical properties of plasma deposited thin films on different substrates were investigated by mens of Depth Sensing Indentation method. The dependence on various parameters and temperature was studied.
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