Fourier components of plasma potential in hydrogen capacitively coupled rf discharge

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Authors

DVOŘÁK Pavel JANČA Jan

Year of publication 2005
Type Article in Proceedings
Conference Proceedings of XXVII International Conference on Phenomena in Ionized Gases
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords plasma potential harmonic hydrogen
Description We measured the amplitudes of the fundamental and higher harmonics of the plasma potential in a low-pressure high frequency (13.56 MHz) hydrogen capacitively coupled discharge. Their dependencies on the position in the discharge and pressure are presented.
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