Energy distribution of hydrogen ions in capacitively coupled low pressure discharge
| Authors | |
|---|---|
| Year of publication | 2005 |
| Type | Article in Periodical |
| Magazine / Source | Acta physica slovaca |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | IED hydrogen capacitively coupled low-pressure discharge plasma |
| Description | The H3+, H2+ and H+ ion energy distributions (IEDs) were recorded in the 13.56 MHz hydrogen glow discharges with the energy dispersive quadrupole mass spectrometer (PPM 421) horizontally mounted between the discharge electrodes. The discharge was capacitively coupled with an asymmetric arrangement. The measurements were spatially resolved along the discharge axis, i.e. perpendicular to the electrodes, and reflected the ion flux to the grounded PPM extraction orifice 15 mm aside the electrodes. The IEDs of H3+ and H+ revealed a saddle structure that was suppressed by an effect of collisions in case of H2+. The H+ with energies up to 10 eV higher than the maximum energy of the saddle structure were observed and explained by a dissociative ionization of H2. We proved an appreciable impedance of the plasma glow region from the width changes of the saddle structure. The effect of pressure and rf power on the IEDs was studied for a fixed position at the glow region. |
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