Study of the mechanical properties of thin films using combined nanoindentation and AFM measurements

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Authors

BURŠÍKOVÁ Vilma KLAPETEK Petr BOUSQUET Angelique ELIÁŠ Marek

Year of publication 2005
Type Article in Periodical
Magazine / Source Jemná mechanika a optika
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords nanoindentation; AFM; thin films; mechanical properties
Description Study of the mechanical properties of thin films prepared by PECVD using combined nanoindentation and AFM measurements.
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