Thermal stability of the optical properties of plasma deposited diamond-like carbon thin films

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Authors

FRANTA Daniel BURŠÍKOVÁ Vilma OHLÍDAL Ivan ZAJÍČKOVÁ Lenka SŤAHEL Pavel

Year of publication 2005
Type Article in Periodical
Magazine / Source Diamond and Related Materials
MU Faculty or unit

Faculty of Science

Citation
Web http://hydra.physics.muni.cz/~franta/bib/DRM14_1795.html
Field Solid matter physics and magnetism
Keywords DLC; Thermal stability; optical properties; sp3/sp2 ratio
Description In present paper we studied the optical constants of the diamond-like carbon (DLC) films and their changes with annealing. The multisample modification of combined variable angle spectroscopic ellipsometry and near normal spectroscopic reflectometry was used. The optical constants of the DLC films were simulated by our recently published six-parameter dispersion model employing a parameterization of the density of electronic states (DOS). Based on the dispersion model parameters the density of and electrons were evaluated. We showed that from our model and the independently determined hydrogen atomic fraction of the films before and after annealing the ratio between momentum matrix elements of pi->pi* and sigma->sigma* transitions and the correct sp3-to-sp2 carbon bonding configuration ratio can be calculated. It is worth to notice that the first quantity is usually assumed to be equal to unity but we showed that this assumption may cause a significant error in the determination of the sp3-to-sp2 ratio. Therefore, our suggested method represents a novelty in this field.
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