Surfatron Plasma Source of Jet Type - Construction and Diagnostics

Warning

This publication doesn't include Faculty of Arts. It includes Faculty of Science. Official publication website can be found on muni.cz.
Authors

STRAŇÁK Vítězslav ŠAFRÁNKOVÁ Jana TICHÝ Milan NAVRÁTIL Zdeněk SLAVÍČEK Pavel ADÁMEK Petr BLAŽEK Josef PROKÝŠEK Miloš ŠPATENKA Petr

Year of publication 2005
Type Article in Proceedings
Conference WDS '05 Proceedings of Contributed Papers
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords surfatron plasma; plasma jet;
Description A plasma source based on surfatron was developed and subjected to detailed diagnostics with the aim of future technological applications e.g. surface activation, biomedical application, plasma sterilisation etc. The surfatron powered by a microwave magnetron generator working at frequency 2.45 GHz in the output power range 0 - 300 W created plasma from the flowing gas in a quartz tube which is inserted into the surfatron body (resonator cavity). The total gas flow rate was kept constant at 600 sccm but the ratio of individual gas components flow was varied. Mixtures of Ar (carrier gas) and N2 or O2 (reactive gases) are investigated mainly. The paper is focused on plasma diagnostics made by means of probe measurement (single and double probe technique) and optical emission spectroscopy. Basic plasma parameters are discussed as radial, axial, power and pressure dependences.
Related projects:

You are running an old browser version. We recommend updating your browser to its latest version.