Influence of Oxygen Admixture on Nitrogen Capacitively Coupled Discharge

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Authors

DVOŘÁK Pavel VAŠINA Petr KUDRLE Vít TÁLSKÝ Antonín

Year of publication 2006
Type Article in Proceedings
Conference Abstracts of Invited Lectures and Contributed Papers of 18th Europhysics Conference on Atomic and Molecular Physics of Ionised Gases
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords nitrogen; oxygen; capacitively coupled discharge
Description Study of capacitively coupled discharge ignited in nitrogen with small amount of oxygen by means of OES, Langmuir probe and mass spectroscopy techniques, proceeding
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