Study of magnetic field influence on charged species in a low pressure helicon reactor
| Authors | |
|---|---|
| Year of publication | 2006 |
| Type | Article in Periodical |
| Magazine / Source | Czechoslovak Journal of Physics |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | helicon reactor; argon; oxygen; electron density; ion flux |
| Description | The variation of electron density, ion flux and emission of argon lines were investigated in a rf helicon reactor for different static magnetic field amplitude and rf power using Langmuir probe, rf coupled planar probe and optical emission spectroscopy. The static magnetic field was created by two Helmholtz coils positioned around the plasma source. Its amplitude B varied by changing the current 0-2 A through the coils from 0 to 10 mT in the helicon source, which corresponded to 0-1.4 mT in the diffusion chamber. We studied Ar and O2 discharges at 0.7 Pa with rf power 50-600 W applied to the helicon antenna. The variations of electron density, ion flux and intensity of Ar 750 nm with the rf power measured in Ar diffusion plasma were in a good agreement. Measurements in oxygen discharge showed slightly different results. |
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