Mechanical properties of nanostructured composite diamond films prepared by PECVD enhanced by RF induced DC self bias

Investor logo
Investor logo

Warning

This publication doesn't include Faculty of Arts. It includes Faculty of Science. Official publication website can be found on muni.cz.
Authors

BURŠÍKOVÁ Vilma FRGALA Zdeněk BURŠÍK Jiří JAŠEK Ondřej ZAJÍČKOVÁ Lenka KARÁSKOVÁ Monika MATĚJKOVÁ Jiřina REK Antonín FRANTA Daniel KLAPETEK Petr

Year of publication 2006
Type Article in Proceedings
Conference E-MRS 2006 Fall meeting
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords nanostructures; composites; diamond films; PECVD; RF induced DC self bias voltage
Description Mechanical properties of nanostructured composite diamond films prepatred by PECVD enhanced by RF induced DC self bias
Related projects:

You are running an old browser version. We recommend updating your browser to its latest version.