Mechanical properties of nanostructured composite diamond films prepared by PECVD enhanced by RF induced DC self bias

• Authors: BURŠÍKOVÁ Vilma; FRGALA Zdeněk; BURŠÍK Jiří; JAŠEK Ondřej; ZAJÍČKOVÁ Lenka; KARÁSKOVÁ Monika; MATĚJKOVÁ Jiřina; REK Antonín; FRANTA Daniel; KLAPETEK Petr
• Year of publication: 2006
• Type: Article in Proceedings
• Conference: E-MRS 2006 Fall meeting
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: nanostructures; composites; diamond films; PECVD; RF induced DC self bias voltage
• Description: Mechanical properties of nanostructured composite diamond films prepatred by PECVD enhanced by RF induced DC self bias

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