Poole–Frenkel conductivity in SiOxHyCz coatings prepared by PECVD

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Authors

FRANCLOVÁ Jana BURŠÍKOVÁ Vilma

Year of publication 2006
Type Article in Periodical
Magazine / Source Czechoslovak journal of physics
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords Conductivity of thin films; Frenkel-Poole
Description The aim of the present work is to investigate the electrical properties of SiOxHyCz coatings prepared by PECVD from mixtures of hexamethyldisiloxane(HMDSO)and oxygen under various deposition conditions. VA characteristics of thin films were measured under various temperatures.
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