Poole–Frenkel conductivity in SiOxHyCz coatings prepared by PECVD

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Authors	FRANCLOVÁ Jana BURŠÍKOVÁ Vilma
Year of publication	2006
Type	Article in Periodical
Magazine / Source	Czechoslovak journal of physics
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	Conductivity of thin films; Frenkel-Poole
Description	The aim of the present work is to investigate the electrical properties of SiOxHyCz coatings prepared by PECVD from mixtures of hexamethyldisiloxane(HMDSO)and oxygen under various deposition conditions. VA characteristics of thin films were measured under various temperatures.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface